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Self aligning vacuum nozzle

Chucks or sockets – Vacuum
Patent

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Semiconductor wafer carrier and method

Chucks or sockets – Vacuum
Patent

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Semiconductor wafer chuck with built-in standoff for contactless

Chucks or sockets – Vacuum
Patent

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Spinner chuck

Chucks or sockets – Vacuum
Patent

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Spinning plate for substrates

Chucks or sockets – Vacuum
Patent

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System and method for optimizing wafer flatness at high...

Chucks or sockets – Vacuum
Reexamination Certificate

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