Inductive plasma reactor

Inductive RF plasma reactor with overhead coil and conductive la

Inductively coupled antenna and plasma processing apparatus...

Inductively coupled dual zone processing chamber with single...

Inductively coupled high density plasma reactor for plasma assis

Inductively coupled planar source for substantially uniform plas

Inductively coupled plasma downstream strip module

Inductively coupled plasma etching apparatus

Inductively coupled plasma generation system with a parallel...

Inductively coupled plasma processing apparatus for very...

Inductively coupled plasma processing apparatus having...

Inductively coupled plasma processing apparatus having...

Inductively coupled plasma reactor with top electrode for enhanc

Inductively coupled RF plasma reactor and plasma chamber...

Inductively coupled RF plasma reactor having an antenna...

Inductively coupled RF plasma reactor having an overhead solenoi

Inductively coupled RF plasma reactor having an overhead solenoi

Inductively coupled RF Plasma reactor having an overhead...

Inductively coupled RF plasma reactor with floating coil antenna

Inductively coupled ring-plasma source apparatus for...