Micromechanical enclosure
Micromechanical piezoelectric device
Micromechanical pipetting device
Micromechanical relay with transverse slots
Micromechanical semiconductor component and manufacturing method
Micromechanical semiconductor sensor
Micromechanical sensor
Micromechanical sensor device
Micromechanical sensor for AFM/STM profilometry
Micromechanical sensors and methods of manufacturing same
Micromechanical structure for receiving and/or generating...
Micromechanical structure, sensor and method for...
Micromechanical thermoelectric sensor element
Microminiature moving device
Micromirror array device with a small pitch size
Micromirror array device with electrostatically deflectable...
Microrelays and microrelay fabrication and operating methods
Microrelays and microrelay fabrication and operating methods
Microstructure and its fabrication method
Microstructure and method of forming the same