Retaining ring with shaped surface

Retaining ring with wear pad for use in chemical mechanical...

Retaining ring with wear pad for use in chemical mechanical...

Retaining rings, planarizing apparatuses including retaining...

Rotary union for semiconductor wafer applications

Structure and method for three chamber CMP polishing head

System and method for CMP head having multi-pressure annular...

Template used for polishing a semiconductor wafer

Two part retaining ring

Wafer carrier having more support ribs and lighter weight...

Wafer carrier wear indicator

Wafer holding ring for chemical and mechanical polisher

Wafer support for chemical mechanical planarization

Workpiece carrier retaining element

Workpiece holder for rotary grinding machines for grinding semic