Abrading – Work holder – Work rotating
Reexamination Certificate
2007-03-13
2007-03-13
Wilson, Lee D. (Department: 3723)
Abrading
Work holder
Work rotating
C451S041000, C451S397000
Reexamination Certificate
active
11195421
ABSTRACT:
Retaining rings, planarizing apparatuses including retaining rings, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, a carrier head for retaining a micro-device workpiece during mechanical or chemical-mechanical polishing includes a workpiece holder configured to receive the workpiece and a retaining ring carried by the workpiece holder. The retaining ring includes an inner surface, an outer surface, a first surface between the inner surface and the outer surface, and a plurality of grooves in the first surface extending from the inner surface to the outer surface. The grooves include at least a first groove and a second groove positioned adjacent and at least substantially transverse to the first groove.
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Kondo, Seiichi, et al., “Abrasive-Free Polishing for Copper Damascene Interconnection”, Journal of the Electrochemical Society, 147, No. 10, pp. 3907-3913 (2000).
Grant Alvin J.
Perkins Coie LLP
Wilson Lee D.
LandOfFree
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