Abrading – Work holder – Work rotating
Reexamination Certificate
2006-03-07
2006-03-07
Eley, Timothy V. (Department: 3724)
Abrading
Work holder
Work rotating
C451S063000, C451S262000, C451S269000, C451S402000
Reexamination Certificate
active
07008310
ABSTRACT:
A wafer carrier for use in polishing disks. The wafer carrier includes a main body and an integral visual inspection wear indicator. The main body has at least one opening formed therein adapted to receive a disk. The visual inspection wear indicator provides a visual indication of when the main body has reached the end of its useful life. The inspection wear indicator may have several portions to incrementally identify the approximate wear stage, that is, the approximate remaining useful life.
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International Search Report.
Eley Timothy V.
Entegris, Inc.
Patterson Thuente Skaar & Christensen P.A.
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