Abrading – Work holder – Work rotating
Reexamination Certificate
2011-04-19
2011-04-19
Nguyen, Dung Van (Department: 3723)
Abrading
Work holder
Work rotating
C451S041000, C451S285000
Reexamination Certificate
active
07927190
ABSTRACT:
A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
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Allen Aden Martin
Balagani Venkata R.
Chen Hung Chih
De Lamenie Romain Beau
Doan Trung T.
Applied Materials Inc.
Fish & Richardson P.C.
Nguyen Dung Van
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