Abrading – Machine – Rotary tool
Reexamination Certificate
2006-10-03
2006-10-03
Rose, Robert A. (Department: 3723)
Abrading
Machine
Rotary tool
C451S526000
Reexamination Certificate
active
07115024
ABSTRACT:
A platen for chemical mechanical polishing of a substrate includes a surface upon which a polishing pad can be placed, a support structure, and a controller. The surface has a first region and a second region and is operable to exert force against the polishing pad during polishing. The support structure is located beneath the second region and is operable to cause the second region to exert more force than the first region. The controller is operable to adjust the amount of force that is exerted by the second region.
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Chen Hung Chih
Garretson Charles C.
Ko Sen-Hou
Osterheld Thomas H.
Salek Mohsen
Applied Materials Inc.
Fish & Richardson
Rose Robert A.
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