4. Abrading
  5. Abrading process
  6. With tool treating or forming

Sen-Hou Ko

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Apparatus for conditioning processing pads

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Apparatus for conditioning processing pads

Abrading – Accessory – Dressing
Reexamination Certificate

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Barrier layer buffing after Cu CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Carrier head with a flexible membrane

Abrading – Machine – Rotary tool
Reexamination Certificate

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Carrier head with a flexible membrane

Abrading – Machine – Rotary tool
Reexamination Certificate

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Profile ID: LFUS-PAI-P-515578

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