4. Cleaning and liquid contact with solids
  5. Processes
  6. Using solid work treating agents

Mohsen Salek

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Apparatus for cleaning edges of contaminated substrates

Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate

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Cartesian cluster tool configuration for lithography type...

Coating apparatus – Work holders – or handling devices
Reexamination Certificate

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Method and apparatus for cleaning edges of contaminated substrat

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent

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Profile control platen

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Profile control platen

Abrading – Machine – Rotary tool
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1338021

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