4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

Thomas H. Osterheld

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Carrier head with a modified flexible membrane

Abrading – Work holder – Work rotating
Reexamination Certificate

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Carrier head with a multilayer retaining ring for chemical...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Chemical mechanical polishing a substrate having a filler...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Chemical mechanical polishing a substrate having a filler...

Abrading – Abrading process – Utilizing fluent abradant
Reexamination Certificate

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Chemical mechanical polishing pad conditioning element with...

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Profile ID: LFUS-PAI-P-464522

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