4. Coating apparatus
  5. Gas or vapor deposition

Applied Materials Inc.

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3 point vacuum chuck with non-resilient support members

Work holders – With fluid means – Vacuum-type holding means
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300 mm CVD chamber design for metal-organic thin film...

Coating apparatus – With heat exchange – drying – or non-coating gas or vapor... – Cooling
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Abatement of fluorine gas from effluent

Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Halogenous component
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Abatement of hazardous gases in effluent

Chemistry: electrical and wave energy – Processes and products – Processes of treating materials by wave energy
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Abatement system targeting a by-pass effluent stream of a...

Gas separation: apparatus – Solid sorbent apparatus – Plural diverse separating means
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