Electrostatic chuck for preventing an arc

Details Electrostatic chuck for preventing an arc Electrostatic chuck for preventing an arc

2005-01-25

2005-01-25

Sircus, Brian (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

06847516

ABSTRACT:
An electrostatic chuck includes: a metal plate; a dielectric layer on the metal plate, the dielectric layer and the metal plate having a lift pin hole and an injection hole of a cooling gas; a lift pin moving up-and-down through the lift pin hole; first protection insulator on an inner surface of the lift pin hole; and second protection insulator on an inner surface of the injection hole.

REFERENCES:
patent: 4480284 (1984-10-01), Tojo et al.
patent: 5002631 (1991-03-01), Giapis et al.
patent: 5600530 (1997-02-01), Smith
patent: 5946184 (1999-08-01), Kanno et al.

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