4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Plasma generating

Hong-Sik Byun

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Electrostatic chuck for preventing an arc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Impedance matching circuit for inductively coupled plasma...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Plasma process chamber monitoring method and system used...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2687232

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