4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. Having glow discharge electrode gas energizing means

Jusung Engineering Co. Ltd.

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Antenna device for generating inductively coupled plasma

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Apparatus for fabricating a semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Apparatus for fabricating semiconductor device and method...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus for generating inductively coupled plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Apparatus for manufacturing semiconductor device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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