4. Electric heating
  5. Metal heating
  6. By arc

Bu-Jin Ko

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Apparatus for manufacturing semiconductor device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck for preventing an arc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Gas diffusion plate for use in ICP etcher

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Gas injector and apparatus including the same

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Impedance matching circuit for inductively coupled plasma...

Electric heating – Metal heating – By arc
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Profile ID: LFUS-PAI-P-2758292

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