4. Fluid handling
  5. Systems
  6. With pump

Hong-Seub Kim

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Electrostatic chuck for preventing an arc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Gas diffusion plate for use in ICP etcher

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Impedance matching circuit for inductively coupled plasma...

Electric heating – Metal heating – By arc
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Method for manufacturing a radio frequency integrated...

Semiconductor device manufacturing: process – Making passive device
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Method for manufacturing low voltage flash memory

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2345494

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