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Method of varying stepper exposure dose to compensate for...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to accurately correlate defect coordinates between photom

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to control gate CD

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to control gate CD

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to determine silver loss in a photographic emulsion manuf

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to improve accuracy of model-based optical proximity...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to monitor lens heating effects

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to pattern a substrate

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to produce equal sized features in microlithography

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to reduce data size and data preparation time for...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to selectively correct critical dimension errors in...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method, program product and apparatus for improving...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methodology for repeatable post etch CD in a production tool

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methods and apparatus for controlling beam blur in...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methods and devices for evaluating imaging characteristics...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methods and systems for lithography process control

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methods and systems to compensate for a stitching...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methods for charged-particle-beam microlithography including...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methods for critical dimension and focus mapping using...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Methods for determining illumination exposure dosage

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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