Conductive coated semiconductor electrostatic deflection plates

Confined energy distribution for charged particle beams

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Cooling module for charged particle beam column elements

Cooling of a device for influencing an electron beam

Correcting method for correcting exposure data used for a...

Correction device for correcting chromatic aberration in particl

Correction device for correcting chromatic aberration in...

Correction device for correcting the lens defects in...

Correction device for correcting the spherical aberration in...

Correction device for the correction of lens aberrations in part

Correction system for a charged-particle beam apparatus

Corrective for eliminating the third-order aperture...

Corrector for axial aberrations in electron optic instruments

Corrector for charged-particle beam aberration and...

Corrector for correcting first-order chromatic aberrations...

Corrector for correcting first-order chromatic aberrations...