Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-03-14
2006-03-14
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S311000
Reexamination Certificate
active
07012262
ABSTRACT:
The invention is directed to a corrector for correcting energy-dependent first-order aberrations of the first degree as well as third-order spherical aberrations of electron-optical lens systems. The corrector includes at least one quadropole septuplet (S1) having seven quadrupoles (Q1to Q7). The quadrupoles are mounted symmetrically to a center plane (ZS) so as to permit excitation along a linear axis. The corrector furthermore includes at least five octopoles (O1to O7) which can be excited within the quadrupole septuplet. In an advantageous embodiment, two quadrupole septuplets are mounted in series one behind the other. The quadrupole fields of the two quadrupole septuplets are excited antisymmetrically to a center plane lying between the two quadrupole septuplets. With such a system, all geometric third-order aberrations and additional energy-dependent first-order aberrations of the third degree and geometric fifth-order aberrations of a lens system can be corrected in addition to the axial and off-axial first-order chromatic aberrations of the first degree.
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Fernandez Kalimah
LEO Elektronenmikroskopie GmbH
Ottesen Walter
Wells Nikita
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