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Synchronous raster scanning lithographic system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Synchronous raster scanning lithographic system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Synchrotron type accelerator and medical treatment system employ

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Synchrotron type accelerator and medical treatment system employ

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Synthetic quartz glass optical material for YAG laser with...

Radiant energy – Irradiation of objects or material
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System and method for adjusting the properties of a device...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for cleaning silicon-coated surfaces in an...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for delivering cooling gas from...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for direct writing to a wafer

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for evaluation using electron beam and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for high resolution field shaping

Radiant energy – Irradiation of objects or material
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System and method for implanting a wafer with an ion beam

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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System and method for improving spatial resolution of...

Radiant energy – Irradiation of objects or material
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System and method for inspecting charged particle responsive...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for irradiation with improved dosage...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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System and method for magnetic scanning, accelerating, and impla

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for maskless lithography using an array of...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for maskless lithography using an array of...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for maskless lithography using an array of...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for measuring overlay errors

Radiant energy – Irradiation of objects or material
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