Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2007-06-26
2007-06-26
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S310000, C250S42300F, C250S3960ML
Reexamination Certificate
active
10998160
ABSTRACT:
An electron beam apparatus having a longer life time of cathode, and allowing a plurality of electron beams to be arranged adequately around an optical axis and five or more electron beams to be formed from a single electron gun. The electron beams emitted from a cathode made of ZrO/W (tungsten zirconium oxide) or a cathode made of carbide of transition metal to the off-optical axis directions may be converged on a sample to scan it. The apparatus includes a plate for reducing a vacuum conductance defined between the electron gun chamber side and the sample side, and apertures are formed through the plate at locations offset from the optical axis allowing for the passage of the electron beams. In order to evaluate a pattern on the sample, the electron beam emitted from the electron gun is incident to the sample surface via an objective lens. The objective lens is composed of a flat electrode having an aperture centered on the optical axis and placed in parallel with the sample surface and an electromagnetic lens including a gap formed in a side facing to the sample. Further, in order to inspect a mask, spacing among a plurality of electron beams after having passed through the mask are extended by a magnifying lens and thus widely spaced electron beams are then converted into optical signal in a scintillator.
REFERENCES:
patent: 6750455 (2004-06-01), Lo et al.
Kato Takao
Nakasuji Mamoru
Noji Nobuharu
Satake Tohru
EBARA Corporation
Johnston Phillip A.
Wells Nikita
Westerman, Hattori, Daniels & Adrian , LLP.
LandOfFree
System and method for evaluation using electron beam and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for evaluation using electron beam and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for evaluation using electron beam and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3823187