Optical heater for cryogenic ion implanter surface regeneration

Details Optical heater for cryogenic ion implanter surface regeneration Optical heater for cryogenic ion implanter surface regeneration

2011-07-12

2011-07-12

Nguyen, Kiet T (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C134S001000

Reexamination Certificate

active

07977652

ABSTRACT:
In an ion implanter, one or more optical heaters are disposed above a pair of support arms. The support arms have an engaged positioned which is disposed beneath a platen and a retractable position displaced vertically away from the platen and rotated away from the platen in a direction parallel to a planar surface thereof. When the support arms are in the retracted position, the one or more optical heaters is configured to provide optical energy incident on surfaces of the cooling pads disposed on the support arms for removal of unwanted materials thereon. In this manner, the optical heaters are used during a regeneration cycle of cryogenic surfaces in an ion implanter.

REFERENCES:
patent: 5625526 (1997-04-01), Watanabe et al.
patent: 5971701 (1999-10-01), Kawamura
patent: 2007/0114208 (2007-05-01), Takahashi
patent: 2008/0044257 (2008-02-01), England et al.
patent: 2009/0303306 (2009-12-01), Fish et al.

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