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Ion beam source

Radiant energy – Ion generation – Field ionization type
Patent

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Ion beam source with coated electrode(s)

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Ion current generator system for thin film formation, ion implan

Radiant energy – Ion generation – Field ionization type
Patent

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Ion emmissive head and ion beam irradiation device incorporating

Radiant energy – Ion generation – Field ionization type
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Ion evaporation source for tin

Radiant energy – Ion generation – Field ionization type
Patent

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Ion extraction assembly

Radiant energy – Ion generation – Field ionization type
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Ion generating apparatus

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Ion generating apparatus for semiconductor manufacturing equipme

Radiant energy – Ion generation – Electron bombardment type
Patent

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Ion generating source for use in an ion implanter

Radiant energy – Ion generation – Electron bombardment type
Patent

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Ion generation by the temporal control of gaseous dielectric...

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Ion generation chamber

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Ion generation method and filament for ion generation apparatus

Radiant energy – Ion generation – Methods
Reexamination Certificate

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Ion generation method and filament for ion generation apparatus

Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate

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Ion generator

Radiant energy – Ion generation – Field ionization type
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Ion generator

Radiant energy – Ion generation – Electron bombardment type
Patent

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Ion generator and ion application system

Radiant energy – Ion generation – Electron bombardment type
Patent

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Ion guide for mass spectrometers

Radiant energy – Ion generation – Field ionization type
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Ion implant using tetrafluoroborate

Radiant energy – Ion generation – With sample vaporizing means
Patent

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Ion implantation device and a method of semiconductor...

Radiant energy – Ion generation – Electron bombardment type
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Ion implantation device with a dual pumping mode and method...

Radiant energy – Ion generation – Field ionization type
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