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Low temperature ion source for calutrons

Radiant energy – Ion generation – Arc type
Patent

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Method for producing metal ions

Radiant energy – Ion generation – Arc type
Patent

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Microfabricated device for selectively removing and...

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Miniaturized cathodic arc plasma source

Radiant energy – Ion generation – Arc type
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Plasma source and applications thereof

Radiant energy – Ion generation – Arc type
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Source arc chamber for ion implanter having repeller...

Radiant energy – Ion generation – Arc type
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Technique for improving performance and extending lifetime...

Radiant energy – Ion generation – Arc type
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Thermal control plate for ion source

Radiant energy – Ion generation – Arc type
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Thermal control plate for ion source

Radiant energy – Ion generation – Arc type
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