Thermal control plate for ion source

Details Thermal control plate for ion source Thermal control plate for ion source

2008-09-16

2008-09-16

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Arc type

C250S42300F, C250S424000, C315S111410, C315S111810, C313S362100

Reexamination Certificate

active

11622966

ABSTRACT:
A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal control plate may support a gas distributor and an anode in the anode assembly. The thermal control plate may have a port for passing working gas from one side of the thermal control plate to the other. An interface surface on the thermal control plate may have a pattern of recesses to allow the working gas to disperse underneath the gas distributor.

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