Radiant energy – Ion generation – Arc type
Reexamination Certificate
2006-08-16
2009-02-17
Berman, Jack I (Department: 2881)
Radiant energy
Ion generation
Arc type
C250S42300F, C250S424000, C250S492200, C250S492210
Reexamination Certificate
active
07491947
ABSTRACT:
A technique improving performance and lifetime of indirectly heated cathode ion sources is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for improving performance and lifetime of an indirectly heated cathode (IHC) ion source in an ion implanter. The method may comprise maintaining an arc chamber of the IHC ion source under vacuum during a maintenance of the ion implanter, wherein no gas is supplied to the arc chamber. The method may also comprise heating a cathode of the IHC ion source by supplying a filament with a current. The method may further comprise biasing the cathode with respect to the filament at a current level of 0.5-5 A without biasing the arc chamber with respect to the cathode. The method additionally comprise keeping a source magnet from producing a magnetic field inside the arc chamber.
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Chaney Craig R.
Cobb Eric R.
Klos Leo V.
Low Russell J.
Berman Jack I
Logie Michael J
Varian Semiconductor Equipment Associates Inc.
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