Low-energy scanning transmission electron microscope

Details Low-energy scanning transmission electron microscope Low-energy scanning transmission electron microscope

1985-03-22

1986-10-21

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, H01J 3726

Patent

active

046187677

ABSTRACT:
Low-energy scanning transmission electron microscopy is achieved by using a sharply pointed electrode as a source of electrons having energies less than 10 eV and scanning the electron emitting pointed source across the surface of a self-supported thin film of material to be investigated at an essentially constant distance on the order of nanometers. The electrons transmitted through the specimen are sensed by a suitable detector and the output signal of the detector is used to control a display unit, such as a CRT display or a plotter. A scanning signal generating means simultaneously controls both the scanning of the electron emitting point source and the display unit while a separation control unit holds the distance between the point source and surface at a constant value. The electron emitting point source and associated mechanical drives as well as the specimen film and electron detector are all positioned in a vacuum chamber and isolated from vibration by a damped suspension apparatus.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4550257 (1985-10-01), Binnig et al.

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