Layered electron beam column and method of use thereof

Details Layered electron beam column and method of use thereof Layered electron beam column and method of use thereof

2006-09-19

2006-09-19

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S3960ML, C250S398000, C250S3960ML, C250S306000, C250S310000, C250S492200, C355S067000

Reexamination Certificate

active

07109486

ABSTRACT:
An electron beam column package comprises a plurality of layers having components, such as lenses, coupled thereto. The layers may be made of LTCC, HTCC or other layer technology.

REFERENCES:
patent: 5122663 (1992-06-01), Chang et al.
patent: 5155412 (1992-10-01), Chang et al.
patent: 6288401 (2001-09-01), Chang et al.
patent: 6369385 (2002-04-01), Muray et al.
patent: 6730623 (2004-05-01), Dai
patent: 6914249 (2005-07-01), Kienzle et al.
T.H. P. Chang et al., “Multiple Electron-Beam Lithography” (Abstract) Etec Systems, Inc., an Applied Materials Company, 3781 Chang MNE)) 120100 v1; pp. 1-26.
L.P. Muray et al., “Advances In Arrayed Microcolumn Lithography” J.Vac. Sci. Technol. B 18(6) Nov./Dec. 2000.

Affiliated with

Also associated with

Rating

Layered electron beam column and method of use thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Layered electron beam column and method of use thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Layered electron beam column and method of use thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3537019