Lattice strain measuring system and method

Details Lattice strain measuring system and method Lattice strain measuring system and method

2006-08-01

2006-08-01

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S307000

Reexamination Certificate

active

07084400

ABSTRACT:
A lattice strain measuring method including the steps of: using a scanning transmission electron microscope12to apply convergent electron beams34to a sample32and obtain a convergent-beam electron diffraction image36of the sample32; computing a lattice strain magnitude of the sample32, based on the obtained convergent-beam electron diffraction image; and displaying the computed lattice strain magnitude, associated with an electron microscope image of the sample32. A scanning transmission electron microscope12is used, whereby electron beams34are caused to scan to thereby suitably set an incidence position. Accordingly, the incidence position of the electron beams can be displaced at a nanometer-order pitch accurately in a short period of time. The use of a scanning transmission electron microscope12requires no image forming lens below the sample32, and the convergent-beam electron diffraction image is free from the distortion due to the influence of an image forming lens. Thus, a distribution of lattice strains in an electronic device having, e.g., a micronized structure can be displayed in an image with high resolving power and with high accuracy and furthermore in a short period of time.

REFERENCES:
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