Micropump
Micropump
Modular getter pumps
Novel getter and process
Nuclear fuel element
Packaged micromachined device such as a vacuum micropump,...
Packaged micromachined device such as a vacuum micropump,...
Particle beam instrumentation ion pump
Plasma vacuum pumping cell
Process for introducing an adsorption agent
Pump
Pump apparatus and pump unit thereof
Pump or a control valve for molten metal
Pumping apparatus
Pumping device by non-vaporisable getter and method for...
Reinforced insulated heater getter device
Rough vacuum pump using bulk getter material
Spatter ion pump
Sputter ion pump
Sputter ion pump