Rough vacuum pump using bulk getter material

Pumps – Electrical or getter type – Getter heating – vaporizing – or regeneration

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F04B 3702

Patent

active

051545829

ABSTRACT:
A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down a vacuum chamber to a rough vacuum. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 2 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a desired vacuum.

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"ST 707 Non-Evaporable Getters Activatable at Low Temperatures", SAES Getters S.p.A., Milan, Italy; Apr. 1987.

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