Pumps – Electrical or getter type
Reexamination Certificate
2008-05-06
2008-05-06
Koczo, Jr., Michael (Department: 3746)
Pumps
Electrical or getter type
Reexamination Certificate
active
07367781
ABSTRACT:
A number of micromachined devices including a micromachined pump for on-chip vacuum is provided. For example, a single-chip micromachined implementation of a Knudsen pump having one or more stages and which uses the principle of thermal transpiration with no moving parts is provided. A six-mask microfabrication process to fabricate the pump using a glass substrate and silicon wafer is shown. The Knudsen pump and two integrated pressure sensors occupy an area of 1.5 mm×2 mm. Measurements show that while operating in standard laboratory conditions, this device can evacuate a cavity to 0.46 atm using 80 mW input power. High thermal isolation is obtained between a polysilicon heater of the pump and the rest of the device.
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Gianchandani Yogesh B.
McNamara Shamus P.
Brooks & Kushman P.C.
Koczo, Jr. Michael
The Regents of the University of Michigan
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