Pumps – Electrical or getter type – Getter heating – vaporizing – or regeneration
Reexamination Certificate
2011-03-22
2011-03-22
Kramer, Devon C (Department: 3746)
Pumps
Electrical or getter type
Getter heating, vaporizing, or regeneration
C417S207000
Reexamination Certificate
active
07909583
ABSTRACT:
A pump device and a pump unit of the pump device. The pump device includes a low-temperature flat plate group (low-temperature portion) having a plurality of flat plates as low-temperature objects arranged parallel with each other at specified intervals in a direction crossing a flow passage for a gas; a high-temperature flat plate group (high-temperature portion) having a plurality of flat plates as high-temperature objects arranged parallel with each other at specified intervals in a direction crossing the flow passage; and, a temperature-operating device operating the temperature of at least one of these flat plate groups so that a temperature difference occurs between these flat plate groups. The flat plates are displaced from each other in the flow direction of the flow passage, and a heat insulating layer is interposed between the low-temperature flat plates and the high-temperature flat plates.
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Sone, Y. et al., “Vacuum Pump Without a Moving Part and it's Performance.” Rarefied Gas Dynamics, ed. A.D. Ketsdever & E.P. Muntz (AIP, New York, 2003) p. 1041-1048.
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Ohbayashi Tetsuro
Sone Yoshio
Sugimoto Hiroshi
Bayou Amene S
Edwards Angell Palmer & & Dodge LLP
Kramer Devon C
Landry Brian R.
Osaka Vacuum, Ltd.
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