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Wafer cell for immersion lithography

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Wafer exposure apparatus

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Wafer flatness evaluation method, wafer flatness evaluation...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Wafer handling method for use in lithography patterning

Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate

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Wafer handling method for use in lithography patterning

Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate

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Wafer handling system for use in lithography patterning

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Wafer holder

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Wafer holder with spring-loaded wafer-holding means

Photocopying – Projection printing and copying cameras – Detailed holder for original
Patent

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Wafer stage assembly, servo control system, and method for...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Wafer stage carrier and removal assembly

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Wafer stepper

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Wafer support device and a wafer support method

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Wafer support plate for photolithographic apparatus

Photocopying – Projection printing and copying cameras – Detailed holder for original
Patent

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Wafer table for immersion lithography

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Wafer table for immersion lithography

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Warmth keeping method for copying machine

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Patent

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Wavefront aberration correction system

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Wavefront aberration measurement method and projection...

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate

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Wavelength selecting method, position detecting method and...

Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate

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Web indicia for synchronizing control apparatus for electrophoto

Photocopying – Projection printing and copying cameras – Combined with or convertible to a contact printer
Patent

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