Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2007-08-07
2007-08-07
Lee, Diane (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S067000
Reexamination Certificate
active
11002906
ABSTRACT:
A wavelength selecting method for selecting a wavelength of light, the light being used to detect a position of a target with a signal from an image of an alignment mark covered with resist, includes the steps of obtaining a reflectance of the resist at a position outside the alignment mark by irradiating lights having plural wavelengths to the resist at the position, and selecting one of the lights which one has a wavelength that provides the maximum value ofreflectance among the reflectances measured by the measuring step or which one has a wavelength that falls within a predetermined wave range centering on the wavelength that provide the maximum reflectance.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Lee Diane
Ohira Marissa A.
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