Wafer holder

Details Wafer holder Wafer holder

2005-01-18

2005-01-18

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

06844921

ABSTRACT:
A wafer holder (20) is capable of preventing foreign matter such as dust from becoming adhered to the wafer. The holder (20) is constituted by providing a wafer supporting portion (13) at one disk surface of a disk-shaped substrate portion (12), with the wafer supporting portion (13) having a ring shape with the smallest possible width over which the peripheral portion of the wafer (10) can be supported. Even if there is foreign matter present on the wafer holder or there is dust/deposit film adhering to the rear surface of the wafer, it is possible to prevent the occurrence of a local resist pattern defect by ensuring that the height of the wafer surface including the resist layer remains unchanged.

REFERENCES:
patent: 5191218 (1993-03-01), Mori et al.
patent: 5382311 (1995-01-01), Ishikawa et al.
patent: 5564682 (1996-10-01), Tsuji
patent: 5685363 (1997-11-01), Orihira et al.
patent: 20010033369 (2001-10-01), Matsui
patent: 20020008864 (2002-01-01), Kondo
patent: 10153851.0 (2001-11-01), None
patent: 1-129438 (1989-05-01), None

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