Wafer stepper

Details Wafer stepper Wafer stepper

1994-09-16

1995-09-19

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, G03B 2772

Patent

active

054520533

ABSTRACT:
In a wafer stepper for fabricating semiconductor ICs (Integrated Circuits), a glass substrate carries thereon a plurality of octagonal patterns formed of a transmissive material. With such a glass substrate, the stepper diffracts light not only in X and Y directions but also in 45.degree. directions and 135.degree. directions. A mask pattern is transferred to a wafer with enhanced resolution and depth of focus.

REFERENCES:
patent: 5208629 (1993-05-01), Matsuo et al.

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