Photocopying – Projection printing and copying cameras – Detailed holder for original
Patent
1977-10-26
1980-02-19
Griffin, Donald A.
Photocopying
Projection printing and copying cameras
Detailed holder for original
269321WE, 355 53, 355132, G01N 2130, G03B 2702, G03B 2762, H01L 2168
Patent
active
041892305
ABSTRACT:
A semiconductor wafer holder, for use in discharge and other processing apparatus, comprised of a non-magnetic frame having an opening defined by an inner wall for receiving a wafer. A non-magnetic circular flange extends out from the frame body over the inner wall forming a bottom surface extending partially into the opening. The bottom surface acts as a mechanical stop for the top surface of a wafer forced up into the opening by a spring-loaded bottom plate. A spring-loaded plunger mechanism extends through a hole in the frame and inner wall into the opening to contact the side edge of a wafer in the opening and forces the wafer into contact with side-edge mechanical stops.
REFERENCES:
patent: 3569718 (1971-03-01), Borner
patent: 3577682 (1971-05-01), Kulischenko
patent: 3645622 (1972-02-01), Cachon et al.
patent: 4093378 (1978-06-01), Horr et al.
I.B.M. Technical Disclosure Bulletin, vol. 17, No. 12, May 1975, p. 3577, Wafer Positioner Caccoma et al.
Fujitsu Limited
Griffin Donald A.
Lovejoy David E.
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