Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-12-01
2009-02-03
Fuller, Rodney E (Department: 2862)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S077000
Reexamination Certificate
active
07486380
ABSTRACT:
Methods and apparatus allow a liquid to be substantially contained between a lens and a wafer table assembly of an immersion lithography system. According to one example, an exposure apparatus includes a lens and a wafer table assembly. The wafer table assembly has a top surface, and is arranged to support a wafer to be moved with respect to the lens as well as at least one component. The top surface of the wafer and the top surface of the component are each at substantially a same height as the top surface of the wafer table assembly. An overall top surface of the wafer table assembly which includes the top surface of the wafer, the top surface of the wafer table assembly, and the top surface of the at least one component is substantially planar.
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Hazelton Andrew J
Takaiwa Hiroaki
Fuller Rodney E
Nikon Corporation
Oliff & Berridg,e PLC
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