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Line width insensitive wafer target detection

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Line width insensitive wafer target detection in two directions

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Line width measuring method, substrate processing method,...

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Line width measuring method, substrate processing method,...

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Line-locked diode laser for gas spectroscopy

Optics: measuring and testing – For light transmission or absorption – Of fluent material
Patent

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Linear and angular displacement measuring interferometer

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Linear and angular displacement measuring interferometer

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Linear and angular displacement measuring interferometer

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Linear and angular retroreflecting interferometric alignment...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Linear backlighting system and method

Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent

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Linear digital readout assembly for milling machines and the lik

Optics: measuring and testing – Refraction testing – Prism engaging specimen
Patent

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Linear direction sensor cameras for position measurement

Optics: measuring and testing – Angle measuring or angular axial alignment – Apex of angle at observing or detecting station
Patent

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Linear displacement and tilting angle measuring device

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Linear encoder providing engagement by engraving

Optics: measuring and testing – By polarized light examination – With light attenuation
Reexamination Certificate

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Linear encoder using diverging light beam diffraction

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Linear fiber array mount to a spectrometer

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Reexamination Certificate

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Linear filter based wavelength locking optical sub-assembly...

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate

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Linear FM chirp laser

Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent

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Linear FM chirp laser

Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent

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Linear frequency modulation control for FM laser radar

Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent

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