Linear and angular displacement measuring interferometer

Details Linear and angular displacement measuring interferometer Linear and angular displacement measuring interferometer

1988-07-08

1989-08-22

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, 356358, 356363, G01B 902

Patent

active

048590665

ABSTRACT:
A single interferometer system (20) which simultaneously measures linear and angular displacement of a movable plane mirror (90) employs a frequency stabilized laser (10) which emits an input beam (12) comprised of two linear orthogonally polarized components which may or may not be of the same optical frequency. The input beam (12) is incident on a beamsplitter (14) which transmits a beam (16) and reflects a beam (15), with the reflected beam (15) being reflected off a mirror (18) to form a beam (17) which is parallel to but spatially offset from beam (16). Beams (16) and (17) are incident on interferometer (20) and are used to measure linear and angular displacement, respectively, using a polarization beamsplitter (80), prism (82), retroreflector (81) and quarter phase retardation plate (88). A phase meter/accumulator (99) extracts any phase change and provides an output (100) which is directly proportional to the linear displacement of the movable mirror (40) for beam (167) and another phase meter/accumulator (109) extracts any phase change and provides output (101) which is directly proportional to the angular displacement of the movable mirror (90). The movable mirror (90) is affixed to the stage whose relative position and angle is being measured.

REFERENCES:
patent: 4717250 (1988-01-01), Sommargren
patent: 4746216 (1988-05-01), Sommargren
patent: 4787747 (1988-11-01), Sommargren et al.

Affiliated with

Also associated with

Rating

Linear and angular displacement measuring interferometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Linear and angular displacement measuring interferometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Linear and angular displacement measuring interferometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2415181