Linear displacement and tilting angle measuring device

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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C356S493000

Reexamination Certificate

active

07869056

ABSTRACT:
A tilting angle measuring device includes an optical device, a four-quadrant optical detector and a computing unit. By the optical device, a light beam emitted by the coherent light source is processed into a reference beam and a test beam. The four-quadrant optical detector has four photoelectric converting units arranged in an array for respectively receiving the reference and test beams. The computing unit is electrically connected to the four-quadrant optical detector for computing a tilting angle of the object with respect to a predetermined position according to four intensity values of the test beam.

REFERENCES:
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patent: 5018862 (1991-05-01), Aiello
patent: 5771098 (1998-06-01), Ghosh et al.
patent: 7230717 (2007-06-01), Brock et al.
patent: 7391521 (2008-06-01), Ishizuka
patent: 2007/0229843 (2007-10-01), Sesko
Zygo, A Primer on Displacement Measuring Interferometers, pp. 1-91, Revised Jan. 1999.
Bursanescu, L., and Vasiliu, V., “Laser System for High Accuracy Alignment and Positioning,” American Institute of Physics, Rev. Sci. Instrum. 65 (5), pp. 1686-1690, May 1994.

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