Method and apparatus for detecting focussing error signal of obj

Method and system for sensing and analyzing a wavefront of...

Method of locating a light at the focal point of a concave mirro

Method of measuring focal point, instrument used therefor,...

Optical autofocus for use with microtiter plates

Optical autofocus for use with microtiter plates

Optical focussing-error detection system

Optical instrument for setting the position of a filament of a s

Phase-shift-moiré focus monitor

Position detection method, exposure apparatus, and device...

Process compensation for step and scan lithography

Proper focusing state detecting device

Spherical aberration detection

Spherical-aberration detection system and optical device...

Surface height and focus sensor