Method of measuring focal point, instrument used therefor,...

Details Method of measuring focal point, instrument used therefor,... Method of measuring focal point, instrument used therefor,...

2004-03-15

2008-08-19

Lauchman, L. G. (Department: 2877)

Optics: measuring and testing

Focal position of light source

C356S125000, C356S399000, C356S400000, C356S401000, C356S618000, C430S005000

Reexamination Certificate

active

07414713

ABSTRACT:
A shape value of a pattern having a pivotal characteristic is measured (step S1), an exposure energy variation is detected from the measured value, a first data base is accessed using a result of the measurement of the shape value (Step S2), an exposure energy is calculated (Step S3), a shape value of an isolated pattern is measured (Step S4), a second data base is accessed using a result of the measurement (Step S5), and a focal variation is determined using the calculated proper exposure energy (Step S6).

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Japanese Office Action dated Feb. 5, 2008, issued in corresponding Japanese Application No. 2003-338142.

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