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  5. Focal position of light source
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Phase-shift-moir&eacute; focus monitor

Optics: measuring and testing – Focal position of light source
Reexamination Certificate

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Position detection method, exposure apparatus, and device...

Optics: measuring and testing – Focal position of light source
Reexamination Certificate

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Process compensation for step and scan lithography

Optics: measuring and testing – Focal position of light source
Reexamination Certificate

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Proper focusing state detecting device

Optics: measuring and testing – Focal position of light source
Patent

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