Position detection method, exposure apparatus, and device...

Details Position detection method, exposure apparatus, and device... Position detection method, exposure apparatus, and device...

2011-01-04

2011-01-04

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Focal position of light source

C355S053000, C355S055000, C355S069000, C355S071000, C356S401000, C356S624000

Reexamination Certificate

active

07864308

ABSTRACT:
This invention discloses a position detection method for detecting the focus position of an optical position detection apparatus including an image sensor and an optical system which forms an image of a target object on the image sensing surface of the image sensor. In this method, the relationship between the position of the target object in the optical-axis direction of the optical system and the evaluation value of the signal output from the image sensor is measured, and the position of a peak close to a reference focus position, which is selected if the evaluation value has a plurality of peaks in the measured relationship, is detected as the focus position.

REFERENCES:
patent: 5969820 (1999-10-01), Yoshii et al.
patent: 6335784 (2002-01-01), Mishima
patent: 7130021 (2006-10-01), Kobayashi
patent: 2008/0160425 (2008-07-01), Hong
patent: 2005-302825 (2005-10-01), None

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