End point detection in workpiece processing

Details End point detection in workpiece processing End point detection in workpiece processing

2008-09-02

2008-09-02

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S445000, C438S016000

Reexamination Certificate

active

11288770

ABSTRACT:
In a workpiece process end point detection system, light is diffused and then light intensity or color is sensed. Optical noise is greatly reduced and more accurate end point detection can be made. A light emitter and a light sensor may be located within a workpiece process chamber. A housing around the light emitter and the light sensor seals out process fluids and also diffuses light passing through. The diffused light may be optically filtered before reaching the light sensor.

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Combined International Search Report and Written Opinion for PCT/US06/44812, dated Jan. 4, 2008 (11 pages).

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