Non-contact type profile measuring apparatus

Non-lithographic shrink techniques for improving line edge...

Optical measurement of lithographic power bias of minimum...

Optical measurements of line edge roughness

Optical measuring device

Optical metrology of single features

Optical metrology of single features

Optical modules and method of precisely assembling same

Optical profilometry of additional-material deviations in a...

Optical profilometry of additional-material deviations in a...

Pellet sorting by diameter measurement

Resolution enhanced optical metrology

Shape measuring apparatus

System and method of detecting the interface between mediums...

Tubular ovality testing

Upper stem diameter measurement and basal area determination...

Width measuring apparatus