Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate
2005-01-04
2005-01-04
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Dimension
Width or diameter
C601S018000, C702S076000
Reexamination Certificate
active
06839145
ABSTRACT:
Disclosed is a method and system for measurement of periodic gratings which have deviations which result in more than two materials occurring along at least one line in the periodic direction. A periodic grating is divided into a plurality of hypothetical layers, each hypothetical layer having a normal vector orthogonal to the direction of periodicity, each hypothetical layer having a single material within any line parallel to the normal vector, and at least one of the hypothetical layers having at least three materials along a line in the direction of periodicity. A harmonic expansion of the permittivity ε or inverse permittivity 1/ε is performed along the direction of periodicity for each of the layers including the layer which includes the first, second and third materials. Fourier space electromagnetic equations are then set up in each of the layers using the harmonic expansion of the permittivity E or inverse permittivity 1/ε, and Fourier components of electric and magnetic fields in each layer. The Fourier space electromagnetic equations are then coupled based on boundary conditions between the layers, and solved to provide the calculated diffraction spectrum.
REFERENCES:
patent: 5164790 (1992-11-01), McNeil et al.
patent: 5607800 (1997-03-01), Ziger
patent: 5739909 (1998-04-01), Blayo et al.
patent: 5835225 (1998-11-01), Thakur
patent: 5867276 (1999-02-01), McNeil et al.
patent: 5963329 (1999-10-01), Conrad et al.
patent: 6172811 (2001-01-01), Wood et al.
patent: 6243348 (2001-06-01), Goodberlet
patent: 6608690 (2003-08-01), Niu et al.
patent: 20010051865 (2001-12-01), Kerr et al.
patent: 20020033954 (2002-03-01), Niu et al.
patent: 20030200063 (2003-10-01), Niu et al.
Ashcroft, N. W. and Mermin, N.D. (1976). “Bloch's Theorem”In Solid State PhysicsSaunders College: Philadelphia, PA pp. 133-134.
Azzam, R.M.A. and Bashara, N.M. (1987).Ellipsometry and Polarized LightElsevier Science: Amsterdam, The Netherlands (Table of Contents Only.).
Bishop, C. M. (1995). “The Multi Layer Perception” Chapter 4In Neural Networks for Pattern RecognitionClarendon Press: Oxford, England pp. 116-163.
Granet, G. and Guizal, B. (1996). “Efficient Implementation of the Coupled-Wave Method for Metallic Lamellar Gratings in TM Polarization,”J. Opt. Soc. Am. 13(5):1019-1023.
Lalanne, P. and Morris, G.M. (1996). “Highly Improved Convergence of the Coupled-Wave Method for TM Polarization,”J. Opt. Soc. Am. 13(4):779-784.
Li, L. and Haggans, C.W. (1993). “Convergence of the Coupled-Wave Method for Metallic Lamellar Diffraction Gratings,”J. Opt. Soc. Am. 10(6):1184-1189.
Moharam, M. G. and Gaylord, T.K. (1981). “Rigorous Coupled-Wave Analysis of Planar-Grating Diffraction,”J. Opt. Soc. Am. 71(7): 811-818.
Moharam, M.G. et al. (1995). “Formulation for Stable and Efficient Implementation of the Rigorous Coupled-Wave Analysis of Binary Gratings,”J. Opt. Soc. Am. 12(5):1068-1076.
Moharam, M.G. et al. (1995). “Stable Implementation of the Rigorous Coupled-Wave Analysis for Surface—Relief Gratings: Enhanced Transmittance Matrix Approach,”J. Opt. Soc. Am. 12(5):1077-1086.
Niu, X. (2001). “Specular Spectroscopic Scatterometry in DUV Lithography,”IEEE Trans. on Semiconductor Manuf14(2):10 pgs.
Press, W. H. et al . (1986). “Simulated Annealing Methods” Chapter 10.9In Numerical Recipes in CSecond Edition Cambridge University Press, pp. 444-455.
Rice, J. A. (1995). “Linear Least Squares” Chapter 14In Mathematical Statistics and Data AnalysisSecond Edition, Duxbury Press, pp. 507-570.
Jakatdar Nickhil
Niu Xinhui
Morrison & Foerster / LLP
Pham Hoa Q.
Timbre Technologies, Inc.
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